Manufacturing process of vacuum ultraviolet light source structure

The structure of the coplanar vacuum ultraviolet light source is mainly composed of the rear substrate, the rear Kovar alloy component made of 1J50 alloy, the front Kovar alloy component made of 1J49 alloy, the MgF2 light window and the stainless steel ring.

In order to make the whole device achieve the purpose of matching sealing, a stainless steel ring transition connection is used between the front and rear Kovar alloy components. A group of coplanar electrodes parallel to each other are fabricated on the rear substrate. The advantage of this structure is that the device structure is simple, the electrode structure design is reasonable, and the wire drawing method is safe and reliable. Due to the coplanar electrode structure, the glass paint sprayer improves the transmission rate of vacuum ultraviolet rays. On the other hand, it can improve the efficiency of VUV generation by adjusting the electrode spacing without being affected by the thickness of the device, and it is easy to achieve thinness.

The manufacturing process of the device includes a pre-process and a post-process.

The pre-process includes the cleaning, annealing of the glass substrate, and the production of the pre-Kovar alloy component; the pre-process includes the production of the pre-Kovar alloy component and the connection of the pre-Kovar alloy and the stainless steel sealing ring. The metal alloy sealed with the MgF2 light window is called a pre-Kovar alloy component. The scanning tunneling microscope sealing joint is made of 1J49 alloy material similar to the thermal expansion coefficient of MgF2 crystal, and the mechanically stamped 1mm thick alloy plate is made by hydrogen burning, calendering, and reburning hydrogen. The entire calendering depth is 78mm. The stainless steel sealing ring adopts the method of mechanical cutting to process the stainless steel pipe into a tubular structure with an outer diameter of 51mm and an inner diameter of 48mm, and then performs cutting and chamfering. After the production of the stainless steel sealing ring is completed, it is welded to the front Kovar alloy component by shielding gas argon arc welding.

The post-process includes post-kovar alloy assembly fabrication and post-substrate electrode printing. The manufacturing process of front and rear alloy Kovar components can be carried out separately and simultaneously to save time and improve yield.

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