LED chip manufacturing equipment status and process introduction

LED is a technology-guided industry, especially for technology and capital-intensive chip manufacturing, which requires high-end process equipment to provide support. However, similar to the “bottleneck” under the semiconductor investment boom, there is still a speed matching problem between equipment R&D and industrial expansion, especially in the field of high-end equipment, most of which still need to rely on imports. The high cost of imported equipment and the long procurement cycle have made China's LED chip manufacturing industry urgently need the growth and rise of local equipment.

First, the current status of upstream epitaxial wafer growth equipment

The LED industry chain is usually defined as three stages of upstream epitaxial wafer growth, midstream chip fabrication and downstream chip packaging testing and application. From upstream to downstream industries, the barriers to entry have been gradually reduced. Among them, the LED industry chain has the highest level of epitaxial growth technology and the highest capital input density, which is the most fierce international competition and the most risky business. In the LED industry chain, epitaxial growth and chip manufacturing account for about 70% of the industry's profits, LED packaging accounts for about 10% to 20%, and LED applications account for about 10% to 20%.

The production equipment used in all links of the industrial chain also follows the above principles from technology to investment. Among the more than 60 enterprises in China's upstream epitaxial wafer growth and midstream chip manufacturing, the core equipment is basically imported from abroad, and the technological development is subject to people, and the technical level is still Can not compare with international mainstream manufacturers. This means that the supply capacity of high-end LED epitaxial wafers and chips in China is far from meeting the needs and requires a large amount of imports, which greatly restricts the development and profitability of the domestic LED industry.

Table 1 LED industry chain overview and key equipment introduction

LED industry chain overview and key equipment introduction

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